The FF20 CT is the expert microCT system for R&D, defect analysis, or CT metrology. It is designed for inspections of very small components and objects in the electronics industry, material science, and other research areas.


产品系列: FF 系列

应用行业: 汽车制造, 微电子, 航空航天, 科研开发, 半导体, 增材制造

缺陷尺寸: <1µm 缺陷, <50µm 缺陷, <1mm 缺陷, >1mm 缺陷

样品尺寸: 小型, 中型

运行模式: 3D, 2D/3D, 计量

FF20 CT highlights

  • Accurate material analyses in laboratory applications
  • 2D detail visibility of down to 150 nm with 190 kV transmission tube
  • Precise manipulation and temperature stability through granite base
  • Intuitive Geminy graphical user interface with touchscreens
  • Optional metrology version with an MPESD = 3.9 µm + L/75 [L in mm]

Non-destructive testing with high energy

The smaller components become, the more important it is to achieve highly accurate, reliable X-ray and CT scans for quality assurance, process control, and small series inspections. The extremely compact high-resolution systems Comet Yxlon FF20 CT and FF20 CT Metrology are designed specifically for the inspection of very fine parts and internal structures. With comparatively high energy of 190 kV, even dense items can be analyzed to the smallest detail.

See more of FF20 CT in the gallery:

Water-cooled 190 kV transmission tube

The 190 kV nano-focus transmission tube achieves a detail visibility in radioscopy (2D) of down to 150 nm. While its water-cooled target and coils allow for quick temperature balance and highest focal spot stability, four modes enable the optimal adjustment of the focal spot size in relation to power. In addition, the granite-based manipulator of the FF20 CT system guarantees temperature stability and smallest thermal expansion for maximum precision and accuracy.

Various trajectories for maximum flexibility

Graphic symbols and a wide range of automated functions enable the intuitive user interface Geminy to provide easy operation – independent of the operator’s skill level. At the same time, it offers a great number of features for flexibility regarding part sizes and inspection tasks, like CT trajectories such as HeliExtend (helical CT scan and reconstruction method), a horizontal field-of-view extension, a virtual rotating axis, and standard Quick/QualityScan.

Which items can be inspected with the FF20 CT?

  • Electronic components incl. SMD
  • Semiconductor packages
  • Battery cells
  • Injection molded plastics
  • Products involving new materials or new manufacturing methods, e.g., additively manufactured components, fiber-reinforced plastics
  • Microsystems (MEMS, MOEMS)
  • Medical objects, e.g., cannulas
  • Geological, paleontological, and biological samples

Which applications is the FF20 CT designed for?

  • Quality assurance, material analysis, material research
  • Failure and structure analysis
  • Assembly checking
  • Inspection of small serial productions
  • Process control
  • Digitization
  • Segmentation

Measuring the finest inner structures with the FF20 CT Metrology

The Comet Yxlon FF20 CT Metrology takes the accuracy of non-destructive measurements of the finest inner structures to the next level. It captures almost unlimited measuring points in one CT scan decoupled from the measurement evaluation. Seamless defect analysis and nominal-actual comparison save time and reduce correction loops and correction costs for product samplings. The FF20 CT Metrology meets the standards of VDI/ VDE 2630.


Technical Details

Attribute Respective Value
Sample Diameter 280 [mm] (11.02")
Sample Height 700 [mm] (27.6")
Maximum Sample Weight 17 [kg]
System Dimension 2380 x 945 x 2180 [mm]
X-ray Tube Y.FXT 190.61 transmission tube
CT Modes QuickScan®, QualityScan, cone-beam CT, helical CT, virtual rotation axis, FoV extensions, volume crop
Manipulation granite-based, active air damping, 6 axes, wide FDD range


One user interface for all tasks

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Life Cycle Service

Ready when and where you need us

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产品信息 - FF20 CT

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