With its optional dual-tube set-up, the FF35 CT combines unprecedented CT data quality with the highest versatility when inspecting small and medium-sized parts.

FF35 CT

Series: FF series

Industry: Automotive, Electronics, Aerospace, Science & research, Foundries, Semiconductors, Add. manufacturing

Defect size: <1µm, <50µm, <1mm, >1mm

Part Size: small size, medium size, large size

Mode of operation: 3D, 2D/3D, metrology

FF35 CT highlights

  • Single or dual tube configuration for highest versatility in laboratory micro-CT applications
  • Switch between micro-focus and nano-focus tubes in seconds with the touch of a single button
  • Accurate results due to granite-based manipulation and air conditioning
  • Application flexibility due to various CT trajectories and FoV extensions via software platform Geminy
  • Optional metrology version with an MPESD = 5.9 µm + L/75 [L in mm]
  • Available as FF35 CT SEMI version in compliance with semiconductor market standards
  • Maximum sample weight now up to 50kg - Also available as an upgrade
  • NEW! Low maintenance 160kV nano-focus tube for the most challenging high-resolution scanning tasks
  • NEW! The 225 kV X-ray tube is now available with a High Density Power (HDP) Target. More power density, faster inspection and improved resolution
The FF35 CT is built for the in-depth analysis of complex parts, such as the GPU shown here

Flexible inspection of very small to medium-sized parts

The Comet Yxlon FF35 CT, FF35 CT Metrology, and FF35 CT SEMI cover an extraordinary range of applications. Capabilities include improved material testing in the R&D department, optimization of process control and small series inspection as well as various scientific applications. The dual X-ray tube set-up enables the high-resolution CT system to significantly expand quality assurance and research possibilities in the automotive, electronics, aviation, and material science industries.

See more of FF35 CT in the gallery:

High flexibility, high stability,
low maintenance.

The FF35 CT is now available with a new
160 kV nanofocus X-ray tube. Combining
the classic advantages of open and closed
tubes, it is perfect for specimens requiring
long scanning times or for continuous
operation while delivering reliable 600 nm
detail visibility and ultimate repeatability.

Proven technology: 225 kV micro-focus directional beam tube

With its high power of 320 W and water-cooled target, the 225 kV Comet Yxlon directional beam tube enables quick CT scans in less than a minute. In 2D operation, the tube reaches a spatial resolution of 4 μm. The possibility of switching between the micro-focus directional beam tube and the nano-focus transmission tube within a single inspection sequence substantially increases the application range. The 225 kV micro-focus tube is also available with a new High Density Power Target. 

The perfect addition: 190 kV nano-focus transmission tube

When it comes to part sizes of 10 mm and smaller, the 190 kV nano-focus transmission tube with its resolution in the submicron range is the right solution. It facilitates the high-resolution inspection of every kind of sample: While its water-cooled tube head allows for quick temperature balance and highest focal spot stability, four modes enable the optimal adjustment of the focal spot size in relation to power. Since both tubes have their own generator and HV cable, they can be switched without the need for reconfigurations.

CT scan of a GPU: 1.4 mm x 1.4 mm field of view, 213 x magnification, showing HBM bumps, TSVs, μ bumps and C4 bumps.
High-power 225 kV micro-focus tube and 190 kV nano-focus transmission tube - the perfect combination
A CT scan of a battery

High Density Power (HDP) Target for the 225 kV X-ray tube. 

With the same form factor and water-cooled stability of the regular high-power target, this new HDP target improves the power density available by a factor of 2. This enables a considerable increase in the usable X-ray dose at smaller focal spot sizes, ultimately leading to faster inspection without sacrificing resolution. The example comparison of a wire arc additively manufactured part shows the improvement possible. At a constant power of 200W, the increased power density of the HDP target enabled a significantly smaller focal spot size, doubling the resolution of the scan and enabling smaller defects to be inspected even more accurately with no loss in imaging speed.

Standard Target HDP Target
Standard Target HDP Target

Sample provided by the ISF - Welding and Joining Institute at RWTH Aachen University

Various trajectories for maximum flexibility

Graphic symbols and a wide range of automated functions enable the intuitive user interface Geminy to provide easy operation – independent of the operator’s skill level. At the same time, it offers a great number of features for flexibility regarding part sizes and inspection tasks including CT trajectories such as HeliExtend (helical CT scan and reconstruction method), a horizontal field-of-view extension, a virtual rotation axis, and standard Quick/QualityScan.

Which items can be inspected with the FF35 CT?

  • Electronic components incl. SMD and semiconductor packages
  • Wafer coupons and dies
  • Microsystems (MEMS, MOEMS)
  • Products involving new materials or new manufacturing methods, e.g., additively manufactured components, fiber-reinforced plastics
  • Battery cells and modules
  • Injection molded plastics
  • Medical objects, e.g., cannulas
  • Light-alloy castings
  • Geological, paleontological and biological samples

Which applications is the FF35 CT designed for?

  • Quality assurance, material analysis, and research
  • Failure and structure analysis
  • Assembly checking
  • Inspection of small serial productions
  • Process control
  • Digitization
  • Segmentation

FF35 CT SEMI: Developed for applications in the semiconductor field

The Comet Yxlon FF35 CT SEMI X-ray system is an innovative, versatile high-resolution CT system for use in research and development and quality assurance. It was developed specifically for inspections in semiconductor-related industries. The FF35 CT SEMI meets the high SEMI® standards, including the hazard and safety standards SEMI® S2-0818 & SEMI® S8-0218, and is certified accordingly.

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Measuring the finest inner structures with the FF35 CT Metrology

The Comet Yxlon FF35 CT Metrology takes the accuracy of CT-based dimensional control, e.g., measurements of finest inner structures, to the next level . It captures nearly unlimited measuring points in one CT scan decoupled from the measurement evaluation. Seamless defect analysis and nominal-actual comparison save time and reduce correction loops and correction costs for product samplings. The FF35 CT Metrology meets the standards of VDI/ VDE 2630.

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Technical Data

Sample Diameter 530 [mm] (20.9")
Sample Height 800 [mm] (31.5")
Maximum Sample Weight 50 [kg]
System Dimensions (W/D/H) 2960 x 1590 x 2120 [mm]
X-ray Tube Single or dual tube system including 160 kV Nano-focus tube or 190 kV transmission tube and
225 kV directional beam tube
Available CT Modes Cone-beam CT, QuickScan, QualityScan, HeliExtend, FlexCenter (virtual rotation axis), ZoomScan, LayerScan, ScanExtend (FoV extensions), Volume crop
Manipulation Granite base, active air damping, 6 to 8 axes, wide FDD range

Software Suite

Visit the Software Suite to find out more about Comet Yxlon's software solutions.

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Life Cycle Service

Ready when and where you need us.

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